South Korean Semiconductor Equipment Maker AP Systems Strategically Invests in SD Optics to Integrate MEMS Optical Inspection for HBM and TGV Markets

AP Systems, a South Korean manufacturer of semiconductor and display panel equipment, announced on October 28 that it has made a strategic equity investment in SD Optics, a provider of ultra-precision optical inspection solutions. AP Systems stated that it will participate in SD Optics' third-party allotment capital increase by subscribing to newly issued convertible preferred shares (CPS). This move aims to internalize SD Optics' core optical technology into AP Systems' equipment and establish a partnership to explore new markets.

SD Optics is the first company globally to commercialize 'Mirror Array Lens System' (MALS) technology based on Micro-Electro-Mechanical Systems (MEMS). This technology controls the movement of micro-mirror arrays at ultra-high speeds (12,000 Hz), enabling real-time focus adjustment without mechanical vibration. It is suitable for 3D shape measurement of samples with large steps and ultra-high-speed vision inspection. Currently, Zeiss microscope systems have adopted this technology, and SD Optics supplies inspection modules and equipment to companies in the semiconductor packaging, glass substrate, and display sectors.

Under the cooperation plan, the two companies will jointly develop next-generation standalone metrology/inspection equipment and process/inspection composite equipment. The target market focuses on advanced semiconductor packaging fields such as High Bandwidth Memory (HBM), Fan-Out Panel-Level Packaging (FO-PLP), and Through-Glass Vias (TGV) for semiconductor glass substrates. AP Systems also plans to equip its main semiconductor and display devices with focus tracking and 3D line scan modules based on SD Optics' MALS technology to enable real-time measurement of surface topography, step height, and residues before and after processes.